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Large Stage IC Inspection Microscope
Reflected and transmitted light illuminator for Inspection of large wafer and photomarks in the IC industry. The microscopes is equipped with a large size mechanical stage, smooth movement of ball bearing guides having low coaxial controls for x-y movement. Objectives M5x-M10x, M20x and M50x. Eye pieces WF10x and WF 15x. Magnification 50x to 750x.

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